Suppression of Shrinkage Mismatch in Hetero-Laminates Between Different Functional LTCC Materials
- 주제(키워드) LTCC , Glass , Tape casting , Shrinkage
- 발행기관 한국전기전자재료학회
- 발행년도 2023
- 총서유형 Journal
- KCI ID ART002931960
- 본문언어 영어
초록/요약
Integrating dielectric materials into LTCC is a convenient method to increase the integration density in electronic circuits. To enable co-firing of the high-k and low-k dielectric LTCC materials in a multi-material hetero-laminate, the shrinkage characteristics of both materials should be similar. Moreover, thermal expansion mismatch between materials during co-firing should be minimized. The alternating stacking of an LTCC with silica filler and that with calcium-zirconate filler was observed to examine the use of the same glass in different LTCCs to minimize the difference in shrinkage and thermal expansion coefficient. For the LTCC of silica filler with a low dielectric constant and that of calcium zirconate filler with a high dielectric constant, the amount of shrinkage was examined through a thermomechanical analysis, and the predicted appropriate fraction of each filler was applied to green sheets by tape casting. The green sheets of different fillers were alternatingly laminated to the thickness of 500 ㎛. As a result of examining the junction, it was observed through SEM that a complete bonding was achieved by constrained sintering in the structure of ‘calcium zirconate 50 vol%-silica 30 vol%-calcium zirconate 50 vol%’.
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