Patterned ALD Sidewall Metallization on CMOS MEMS and Applications.
- 주제(키워드) Complementary metal-oxide-semiconductor , Microelectromechanical systems , Dielectric sidewalls
- 발행기관 Carnegie Mellon University
- 발행년도 2022
- 학위명 박사
- 학과 및 전공 Electrical and Computer Engineering
- ISBN 9798837546761
- UCI I804:11009-000000273667
- 제출원본 PQDT29261217
