Single Crystalline Silicon Optical MEMS with Photonic Crystal Mirrors.
- 주제(키워드) Applied physics , Silicononnothing , Microelectromechanical systems , GoosHanchen shift
- 발행기관 Stanford University
- 발행년도 2018
- 학위명 박사
- ISBN 9798684632273
- UCI I804:11009-000000247877
- 제출원본 PQDT28209596
