An integrated MacheZehnder interferometric biosensor with a silicon oxynitride waveguide by plasma-enhanced chemical vapor deposition
An integrated MacheZehnder interferometric biosensor with a silicon oxynitride waveguide by plasma-enhanced chemical vapor deposition
- 주제(키워드) Integrated MacheZehnder interferometric , biochip , Silicon oxynitride layers , Plasma-enhanced chemical vapor , deposition , DNA
- 발행기관 한국물리학회
- 발행년도 2014
- 총서유형 Journal
- UCI G704-001115.2014.14.7.009
- KCI ID ART001895927
- 본문언어 영어
초록/요약
We report the design and fabrication of an integrated MacheZehnder interferometric (MZI) biochip based on silicon oxynitride layers deposited with a plasma-enhanced chemical vapor deposition (PECVD) process. A rib waveguide for an integrated MZI sensor has been designed to have a high surface sensitivity and a single-mode behavior by using an effective index method. The integrated MZI chip operating at 637 nm is fabricated via conventional photolithography and reactive ion etching. As a biosensor application, the real-time and label-free detection of the covalent immobilization and hybridization of DNA strands is performed and verified with this device.
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