Characterization of hydrogenated Al-doped ZnO films prepared by multi-step texturing for photovoltaic applications
Characterization of hydrogenated Al-doped ZnO films prepared by multi-step texturing for photovoltaic applications
- 주제(키워드) ZnO:Al , Hydrogenated , RF magnetron sputter , TCO , Surface textured
- 발행기관 한국물리학회
- 발행년도 2011
- 총서유형 Journal
- UCI G704-001115.2011.11.3.057
- KCI ID ART001553252
- 본문언어 영어
초록/요약
In this study, we investigated the effect of the multi-step texturing process on the electrical and optical properties of hydrogenated Al-doped zinc oxide (HAZO) thin films deposited by RF magnetron sputtering. After their deposition, the surface of the HAZO films was multi-step textured in dilute HCl (0.5%)to investigate the change in their optical properties and surface morphology due to etching. The HAZO film fabricated under the type III condition showed excellent optical properties with a haze value of 50.81%. The microcrystalline silicon (μc-Si:H)-based p―i―n solar cells prepared using these new textureetched HAZO substrates showed high quantum efficiencies in the long wavelength range, thereby demonstrating effective light trapping. Using the optimum AZO:H thin film textured surface, we achieved a p―i―n μc-Si solar cell efficiency of 7.08%.
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