Nanomaterial-embedded gas sensor fabrication
Nanomaterial-embedded gas sensor fabrication
- 주제(키워드) Nanomaterial , Gas sensors , Highly sensitive , Massive production
- 발행기관 한국물리학회
- 발행년도 2009
- 총서유형 Journal
- UCI G704-001115.2009.9.2.022
- KCI ID ART001351476
- 본문언어 영어
초록/요약
Nanomaterial-embedded gas sensors were fabricated on a 4-in. Si wafer counting 200 units. Carbon nanotubes (CNTs) and tin oxide (SnO) nanoparticles were prepared as hosts to detect NO2 gas molecules at room temperature. Ink-jet approach was applied to deposit nanomaterials on a Si wafer. Metal deposition above the nanomaterials formed the metal-sitting structure providing spontaneous passivation. The performance of the CNT sensor and SnO sensor showed distinctive responses to NO2 gas depending on the type of semiconductor. The sensor is highly sensitive, to detect a 10 ppb level of NO2. It offers massive production of nanomaterial gas sensor units, and the performance is discussed.
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