Min-Max 알고리즘을 이용한 피에조 구동형 스테이지의 최적설계 및 성능평가 : Optimal Design and Performance Evaluation of PZT-driven Stage Using Min-Max Algorithm
Optimal Design and Performance Evaluation of PZT-driven Stage Using Min-Max Algorithm
- 주제(키워드) Flexure hinge , Round notch , Nano positioning stage , Min-Max algorithm , Flexure hinge , Round notch , Nano positioning stage , Min-Max algorithm , 플렉셔 힌지 , 원형 노치 , 나노 위치결정용 스테이지 , Min-Max 알고리즘
- 발행기관 한국정밀공학회
- 발행년도 2005
- 총서유형 Journal
- UCI G704-000101.2005.22.9.010
- KCI ID ART000967939
초록/요약
This paper presents an optimal design and the performance evaluation of two-axis nano positioning stage with round notched flexure hinges. A flexure hinge mechanism with round notched flexure hinges is to guide the linear motions of a moving plate in the nano positioning stage. A Min-Max algorithm is applied to the design of the flexure hinge mechanism for nano positioning stage. In the design process, the structure of the flexure hinge mechanism is fixed, then the radius of a round hole and the width of two round holes are chosen as design variables, and finally the design variables are calculated by the Min-Max algorithm. The machined flexure hinge mechanism, stack type PZTs for actuation and capacitance type displacement sensors for position measurement are assembled into the nano positioning stage. The experimental results of the manufactured nano positioning stage show the first modal resonance frequency of 197 Hz, the operating range of 40 m, and the resolution of 3 nm.
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