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Fabrication and Characterization of Silicon-Based Photodiode for Detection of Luminol Chemiluminescence in a Biosensor

Fabrication and Characterization of Silicon-Based Photodiode for Detection of Luminol Chemiluminescence in a Biosensor

초록/요약

In this paper, a silicon-based p$^+$-n junction photodiode is fabricated by semiconductor processing as a detector for luminol chemiluminescence (CL) that is used in present the biosensor. The optimum conditions of the CL reaction are determined by horse-radish peroxidase (HRP) concentration, the reagent mixture ratio of luminol with HRP and hydrogen peroxide (H$_2$O$_2$) in the reactor well made of polydimethylsiloxane (PDMS). The output current of the photodiode is measured for CL by H$_2$O$_2$ concentration under 2 mM luminol and 25 units HRP. As the H$_2$O$_2$ concentration increases, the photodiode output current peak values increase. The photocurrent is linearly related to the H$_2$O$_2$ concentration in the range 0.01 $\sim$ 0.5 mM, and then the sensitivity of the photodiode is 23.429 pA/mM$\cdot$mm$^2$.

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