Force Sensing by Electrical Contact Resistance in SOI-DRIE MEMS.
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주제(키워드)
CONTACT
, CONTACT RESISTANCE
, Contact resistance
, DRIE
, ELECTRICAL
, FORCE
, FORCE SENSING
, Force sensing
, INERTIAL SENSING
, Inertial sensing
, MEMS
, MICROELECTROMECHANICAL SYSTEMS
, MICROFABRICATION
, Microelectromechanical systems
, Microfabrication
, RESISTANCE
, SENSING
, SOI
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발행기관
University of Maryland, College Park
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발행년도
2018
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학위명
박사
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학과 및 전공
Mechanical Engineering
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UCI
I804:11009-000000154192
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제출원본
PQDT10743460
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