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Research on Terahertz Sources and Antenna Components using InP DHBT and CMOS technology : Frequency Multiplier, Voltage Controlled Oscillator, and On chip Antenna operating above 300 GHz

초록/요약

In this thesis, monolithic terahertz sources and antenna using Teledyne InP 250-nm DHBT and Samsung 65-nm CMOS process are introduced. For terahertz sources, high power 600 GHz multiplier and 300 GHz voltage controlled oscillator using InP DHBT are fabricated and measured offering output power of -8 dBm at 600 GHz and 5.8 dBm at 300 GHz, respectively. Additionally, low cost 600 GHz multiplier using CMOS varactor showing -20.9 dBm of output power is also demonstrated. For terahertz on-chip antenna, a cavity antenna using only standard InP environment is developed with on-wafer far-field measurement method. The cavity antenna provide more than 50% of efficiency within 20 GHz of bandwidth around 280 GHz unlike the patch antenna offers 20% of peak efficiency with less than 10 GHz of bandwidth. Moreover, a multi-mode cavity antenna and a cavity-backed wire array antenna are demonstrated in an attempt to improve bandwidth and cope with cut-off problem caused by cavity depth shortage, respectively. For the last chapter, far-field measurement method using standard on-wafer probe measurement system to characterize antenna efficiency and radiation pattern of on-chip antenna is described.

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목차

1. Transistor-based Monolithic Terahertz Sources 1
1.1. 600 GHz Single-Balanced Doubler using InP 250nm DHBT Technology 1
1.2. 600 GHz Varactor Doubler using 65nm CMOS Technology 10
1.3. Voltage Controlled Oscillator using InP 250nm DHBT Technology 18
Bibliography 23
2. Terahertz On-chip Antenna Design and Far-field Measurement 25
2.1. Cavity Antenna Utilizing Thick InP Substrate 25
2.1.1. Background 25
2.1.2. Single-mode Cavity Antenna 30
2.1.3. Other Types of Cavity Antenna 38
2.2. Development of Terahertz On-chip Far-field Measurement System 46
2.2.1. Background 46
2.2.2. Far-field Measurement System Setting 50
2.2.3. Radiation Efficiency and Normalized Pattern Measurement 60
Bibliography 64
3. Conclusion 66

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