Optical and electrical properties of SnO2 based multilayer transparent conducting thin films explored by continuous composition spread
- 주제(키워드) Continuous composition spread (CCS) , TCO , OMO multilayer , SnO2 , doping
- 발행기관 고려대학교 대학원
- 지도교수 남산
- 발행년도 2017
- 학위수여년월 2017. 2
- 학위구분 석사
- 학과 대학원 신소재공학과
- 원문페이지 59 p
- 실제URI http://www.dcollection.net/handler/korea/000000072012
- 본문언어 영어
- 제출원본 000045897504
초록/요약
As a potential replacement of indium-tin oxide (ITO), Zn-doped SnO2/Ag/Zn-doped SnO2 multilayer transparent conducting electrodes were prepared on the flexible poly ethylene terephthalate (PET) substrates by RF sputtering at room temperature. To find the optimized composition of Zn-doped SnO2 thin film, which will have higher conductivity and transmittance as compared to the undoped SnO2 thin film, an off-axis Continuous Composition Spread (CCS) sputtering method was used. Zn-doped SnO2 thin films have lower resistivity than undoped SnO2 thin films due to excess oxygen vacancies (Vo) and/or zin interstitials (Zni) in thin films. The minimum resistivity of thin film was 0.13 Ω∙cm at optimized 2.43 wt% Zn-doping. Zn-doped SnO2/Ag/Zn-doped SnO2 multilayer thin films were prepared using the optimized composition deposited by an on-axis RF sputter. The multilayer TCO film has the resistivity ~ 5.33 x 10-5 Ω∙cm and the average transmittance > 85 % in the 550 nm wavelength region.
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TABLE OF CONTENTS
ABSTRACT
LIST OF FIGURES
Chapter 1. Introduction...............................................................................................1
Chapter 2. Theoretical backgrounds
2.1 Transparent conducting oxides (TCOs)…………………………………………………4
2.2 Indium tin oxide (ITO)……………………………………………………………………..6
2.3 Tin oxide (SnO2)…………………………………………………………………………...8
2.4 Continuous composition spread (CCS) sputtering method…………………………..11
2.5 Oxide/Metal/Oxide (OMO) multilayer structure……………………………………….15
Chapter 3. Experiments
3.1 Deposition of full range of Zn-doped SnO2 films on glass substrates………………18
3.2 Fabrication of Zn-doped SnO2/Ag/Zn-doped SnO2 multilayer structure on a PET substrate……………………………………………………………………………………19
3.3 Characterization of Zn-doped SnO2 thin films…………………………………………20
Chapter 4. Results & Discussion
4.1 Deposition of full range of Zn-doped SnO2 films on glass substrates………………21
4.2 The electrical properties of Zn-doped SnO2 thin films…………………………….….23
4.3 XPS………………………………………………………………………………………...25
4.4 The structural properties of Zn-doped SnO2 films
4.4.1 XRD………………………………………………………………………………….28
4.4.2 AFM………………………………………………………………………………….30
4.5 Confirm the optimized composition of Zn-doped SnO2 thin film…………………….32
4.6 Fabrication of the Zn-doped SnO2/Ag/Zn-doped SnO2 multilayers thin film on a PET substrate……………………………………………………………………………………34
4.7 The electrical properties of Zn-doped SnO2/Ag/Zn-doped SnO2 multilayers thin film on PET substrate…………………………………………………………………………..36
4.8 Optical transmittance of Zn-doped SnO2/Ag/Zn-doped SnO2 multilayers thin film deposited on PET substrate………………………………………………………………39
Chapter 5. Conclusion………………………………………………………………….....41
References…………………………………………………………………………………..…43
