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고진공 주사탐침열파현미경을 이용한Bi2Te3나노선의 열전도도 계측

Measuring the thermal conductivity of Bi2Te3 nanowire with High Vacuum Scanning Thermal Wave Microscopy

초록/요약

With the increasing application of nanomaterials in the development of high-efficiency thermoelectric energy conversion materials and electronic devices, the measurement of the intrinsic thermal conductivity of nanomaterials in the form of nanowires and nanofilms has become very important. However, the current widely used methods for measuring thermal conductivity have difficulties in eliminating the influence of interfacial thermal resistance (ITR) during the measurement. In this study, by using high-vacuum scanning thermal wave microscopy (HV-STWM), we propose a novel quantitative method for measuring the thermal conductivity of nanomaterials. By measuring the local phase lag of high-frequency (>10 kHz) thermal waves passing through a nanomaterial in a high-vacuum environment, HV-STWM eliminates the measurement errors due to ITR and the distortion due to heat transfer through air. By using HV-STWM, we measure the thermal conductivity of a Bi2Te3 nanowire. Because HV-STWM is quantitatively accurate and its specimen preparation is easier than in the thermal bridge method, we believe that HV-STWM will be widely used for measuring the thermal properties of various types of nanomaterials.

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목차

1. 서론 6
2. STWM의 계측 원리 8
3. 계면열저항에 따른 계측 오차 분석 12
4. 시편 준비 17
5. SiO2 나노리본을 사용한 Benchmark Test 20
6. HV-STWM을 사용한 Bi2Te3 나노선의 열전도도 계측 실험 26
7. 결론 30

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