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Multi-step Virtual Metrology Using Machine Learning for Semiconductor Manufacturing : Imputation of Missing Variable in Multi-step Process

전창동 (대학원 산업경영공학과 산업경영공학전공)

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초록  more
In order to produce high-quality products in semiconductor-manufacturing processes, it is necessary to increase the number of measurements for monitoring the state of the product. However, when considering production efficiency, it is necessary to limit the number of measurements. The optimization o ...
목차  more
1. Introduction………………………………………………………1
2. Single-Step VM …………………………………………………5
2.1. Critical process selection and data collection…………7
...
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